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1

Dopant profiling of ultra shallow As implanted in Si with and without spike annealing using medium energy ion scattering

S. Abo, S. Ichihara, T. Lohner, F. Wakaya, T. Eimori, Y. Inoue, M. Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2005

Language:

english

File:

PDF, 150 KB

english, 2005

2

Theory on the Coulomb blockade and current–voltage characteristics in Tomonaga–Luttinger liquid C-SET

Chika Tanaka, Shuichi Iwabuchi, Fujio Wakaya

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2004

Language:

english

File:

PDF, 290 KB

english, 2004

3

[IEEE 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - Roanoke, VA, USA (2013.07.8-2013.07.12)] 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - CNT cold cathode with side-gate electrode for flat panel X-ray source

Nitta, Shogo, Okawaki, Shuhei, Abo, Satoshi, Wakaya, Fujio, Takai, Mikio

Year:

2013

Language:

english

File:

PDF, 337 KB

english, 2013

4

Linear and nonlinear transports of coupled quantum dots

Shuji Tsubaki, Naoki Fujita, Fujio Wakaya, Yoshihiko Yuba, Kenji Gamo

Journal:

Superlattices and Microstructures

Year:

2000

Language:

english

File:

PDF, 786 KB

english, 2000

5

Resistively coupled single-electron transistor using tunnel gate resistor

Fujio Wakaya, Shinya Nakamichi, Shunji Mandai, Shuichi Iwabuchi, Kenji Gamo

Journal:

Superlattices and Microstructures

Year:

2000

Language:

english

File:

PDF, 263 KB

english, 2000

6

Fabrication of narrow channels in GaAs-AlGaAs heterostructures and the lateral quantization effect

Y. Takagaki, F. Wakaya, Y. Kusumi, S. Takaoka, Y. Yuba, K. Gamo, K. Murase, S. Namba

Journal:

Microelectronic Engineering

Year:

1989

Language:

english

File:

PDF, 383 KB

english, 1989

7

Low energy focused ion beam and buried electron waveguides fabrication

F. Wakaya, A. Nozawa, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. Gamo

Journal:

Microelectronic Engineering

Year:

1994

Language:

english

File:

PDF, 362 KB

english, 1994

8

Investigation of growth interruption in the UHV total vacuum process for buried quantum structures

F. Wakaya, T. Matsubara, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. Gamo

Journal:

Microelectronic Engineering

Year:

1996

Language:

english

File:

PDF, 303 KB

english, 1996

9

Improvement of current sensitivity in detecting current-induced magnetic field using magnetic force microscopy

F. Wakaya, M. Kajiwara, K. Kubo, S. Abo, M. Takai

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 285 KB

english, 2011

10

Reliability study of bulk and SOI SRAMs using high energy nuclear probes

Satoshi Abo, Hiroto Yamagiwa, Toshiaki Iwamatsu, Shigeto Maegawa, Yutaka Arita, Takashi Ipposhi, Atsushi Kinomura, Fujio Wakaya, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2005

Language:

english

File:

PDF, 178 KB

english, 2005

11

Compositional analysis of HfxSiyO1−x−y thin films by medium energy ion scattering (MEIS) analysis

H. Kitano, S. Abo, M. Mizutani, J. Tsuchimoto, T. Lohner, J. Gyulai, F. Wakaya, M. Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2006

Language:

english

File:

PDF, 377 KB

english, 2006

12

Development of time-of-flight RBS system using multi microchannel plates

N.V. Nguyen, S. Abo, T. Lohner, H. Sawaragi, F. Wakaya, M. Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2007

Language:

english

File:

PDF, 418 KB

english, 2007

13

Nuclear nanoprobe development for visualization of three-dimensional nanostructures

M. Takai, S. Abo, F. Wakaya, T. Kikuchi, H. Sawaragi

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2007

Language:

english

File:

PDF, 206 KB

english, 2007

14

Evaluation of soft error rates using nuclear probes in bulk and SOI SRAMs with a technology node of 90 nm

Satoshi Abo, Naoyuki Masuda, Fujio Wakaya, Shinobu Onoda, Toshio Hirao, Takeshi Ohshima, Toshiaki Iwamatsu, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2010

Language:

english

File:

PDF, 399 KB

english, 2010

15

Study on time resolution of single event TOF-RBS measurement

Satoshi Abo, Shunya Kumano, Katsuhisa Murakami, Fujio Wakaya, Tivadar Lohner, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2010

Language:

english

File:

PDF, 814 KB

english, 2010

16

Electron focusing effects in the in-plane gated structures

Fujio Wakaya, Yukihiko Takagaki, Sadao Takaoka, Kazuo Murase, Yoshihiko Yuba, Kenji Gamo, Susumu Namba

Journal:

Superlattices and Microstructures

Year:

1992

Language:

english

File:

PDF, 281 KB

english, 1992

17

Effects of growth interruption and FIB implantation in the UHV total vacuum process for the buried mesoscopic structures

F. Wakaya, T. Matsubara, H. Nakayama, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. Gamo

Journal:

Physica B: Condensed Matter

Year:

1996

Language:

english

File:

PDF, 192 KB

english, 1996

18

Detection of magnetic field for measuring current distribution in metal nanostructure

K. Tanaka, Y. Mori, H. Yamagiwa, S. Abo, F. Wakaya, M. Takai

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 240 KB

english, 2007

19

Fabrication of a carbon nanotube device using a patterned electrode and a local electric field

Fujio Wakaya, Jun Takaoka, Kiyofumi Fukuzumi, Mikio Takai, Yoichi Akasaka, Kenji Gamo

Journal:

Superlattices and Microstructures

Year:

2003

Language:

english

File:

PDF, 676 KB

english, 2003

20

Surface preparation and characterization of single crystalline β-FeSi2

Yoichi Yamada, Ippei Wakaya, Shinji Ohuchi, Hiroyuki Yamamoto, Hidehito Asaoka, Shin-ichi Shamoto, Haruhiko Udono

Journal:

Surface Science

Year:

2008

Language:

english

File:

PDF, 1.17 MB

english, 2008

21

Single electron tunneling device controlled by environmental impedance modulation

Fujio Wakaya, Shuichi Iwabuchi, Hitoshi Higurashi, Yosuke Nagaoka, Kenji Gamo

Journal:

Solid-State Electronics

Year:

1998

Language:

english

File:

PDF, 471 KB

english, 1998

22

Position control of carbon nanotube using patterned electrode and electric field

Fujio Wakaya, Takayoshi Nagai, Kenji Gamo

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 374 KB

english, 2002

23

Fabrication of buried quantum structures using FIB-MBE total vacuum process

F. Wakaya, J. Yanagisawa, T. Matsubara, H. Nakayama, Y. Yuba, S. Takaoka, K. Murase, K. Gamo

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 289 KB

english, 1997

24

Single-electron transistor controlled by environmental impedance: Effects of capacitive environmental impedance

F. Wakaya, F. Yoshioka, S. Furuichi, H. Higurashi, S. Iwabuchi, Y. Nagaoka, K. Gamo

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 586 KB

english, 1999

25

Effects of asymmetric environment on the island charge state of single-electron transistors

F. Wakaya, S. Iwabuchi, H. Higurashi, Y. Nagaoka, K. Gamo

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 290 KB

english, 1999

26

Coulomb blockade and higher order tunneling effect in ultrasmall ferromagnetic double tunnel junction

Reiko Kitawaki, Fujio Wakaya, Shuichi Iwabuchi

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 291 KB

english, 1999

27

Carrier profiles and electron traps at a growth-interrupted layer in GaAs fabricated by a focused ion beam and molecular beam epitaxy combined system

T. Goto, T. Hada, J. Yanagisawa, F. Wakaya, Y. Yuba, K. Gamo

Journal:

Applied Surface Science

Year:

2000

Language:

english

File:

PDF, 146 KB

english, 2000

28

Control of magnetization rotation using submicron-wide cross geometry

Takashi Kimura, Fujio Wakaya, Kenji Gamo

Journal:

Journal of Magnetism and Magnetic Materials

Year:

2002

Language:

english

File:

PDF, 176 KB

english, 2002

29

Amorphous molecular materials: development of novel negative electron-beam molecular resists

Toshiaki Kadota, Hiroshi Kageyama, Fujio Wakaya, Kenji Gamo, Yasuhiko Shirota

Journal:

Materials Science and Engineering: C

Year:

2001

Language:

english

File:

PDF, 117 KB

english, 2001

30

Transport of coupled double quantum dots in series

Naoki Fujita, Fujio Wakaya, Yoshihiko Yuba, Kenji Gamo

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2000

Language:

english

File:

PDF, 315 KB

english, 2000

31

Time of flight elastic recoil detection analysis with toroidal electrostatic analyzer for ultra shallow dopant profiling

Satoshi Abo, Hidemasa Horiuchi, Fujio Wakaya, Gabor Battistig, Tivadar Lohner, Mikio Takai

Journal:

Surface and Interface Analysis

Year:

2012

Language:

english

File:

PDF, 403 KB

english, 2012

32

Capacitively- and resistively-coupled single-electron transistor

F. Wakaya, S. Mandai, S. Nakamichi, S. Iwabuchi, K. Gamo

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 780 KB

english, 2000

33

Fabrication of carbon nanotube devices by electroplating with in situ observation

F. Wakaya, Y. Ogi, M. Yoshida, S. Kimura, M. Takai, Y. Akasaka, K. Gamo

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 231 KB

english, 2004

34

Three dimensional measurement of nanostructures by single event TOF-RBS with nuclear nano probe

Satoshi Abo, Shunya Kumano, Takayuki Azuma, Ryota Sugimoto, Kohei Koresawa, Katsuhisa Murakami, Fujio Wakaya, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2011

Language:

english

File:

PDF, 901 KB

english, 2011

35

Effect of a body-tie structure fabricated by partial trench isolation on the suppression of floating body effect induced soft errors in SOI SRAM investigated using nuclear probes

Satoshi Abo, Naoyuki Masuda, Fujio Wakaya, Shinobu Onoda, Takahiro Makino, Toshio Hirao, Takeshi Ohshima, Toshiaki Iwamatsu, Hidekazu Oda, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2011

Language:

english

File:

PDF, 492 KB

english, 2011

36

Study on spatial resolution of three-dimensional analysis by full count TOF-RBS with beryllium nanoprobe

Satoshi Abo, Takayuki Azuma, Tivadar Lohner, Fujio Wakaya, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2012

Language:

english

File:

PDF, 989 KB

english, 2012

37

Difference of soft error rates in SOI SRAM induced by various high energy ion species

Satoshi Abo, Naoyuki Masuda, Fujio Wakaya, Tivadar Lohner, Shinobu Onoda, Takahiro Makino, Toshio Hirao, Takeshi Ohshima, Toshiaki Iwamatsu, Hidekazu Oda, Mikio Takai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2012

Language:

english

File:

PDF, 330 KB

english, 2012

38

Formation of narrow grooves on thin metal layer by focused ion beam etching

M. Yoshida, S. Murakami, M. Nakayama, J. Yanagisawa, F. Wakaya, T. Kaito, K. Gamo

Journal:

Microelectronic Engineering

Year:

2001

Language:

english

File:

PDF, 772 KB

english, 2001

39

Control of domain structures in magnetic multilayer using submicron-patterned antiferromagnetic structure

Takashi Kimura, Yoshio Itagaki, Fujio Wakaya, Kenji Gamo

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 551 KB

english, 2002

40

Contact resistance of multiwall carbon nanotubes

F. Wakaya, K. Katayama, K. Gamo

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 166 KB

english, 2003

41

Effects of growth interruption in in situ process for buried quantum structures

F. Wakaya, T. Matsubara, M. Nakayama, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. Gamo, K. Gamo

Journal:

Microelectronic Engineering

Year:

1998

Language:

english

File:

PDF, 253 KB

english, 1998

42

Carrier activation in in situ Si-doped GaAs layers fabricated by a focused Si ion beam and molecular beam epitaxy combined system

Takuo Hada, Hirotaka Miyamoto, Junichi Yanagisawa, Fujio Wakaya, Yoshihiko Yuba, Kenji Gamo

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2001

Language:

english

File:

PDF, 102 KB

english, 2001

43

Maskless Mn implantation in GaAs using focused Mn ion beam

M. Itou, M. Kasai, T. Kimura, J. Yanagisawa, F. Wakaya, Y. Yuba, K. Gamo

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2003

Language:

english

File:

PDF, 230 KB

english, 2003

44

Magnetization process and resistance jumps in a submicron-scale cross-shaped Co wire

Takashi Kimura, Fujio Wakaya, Junichi Yanagisawa, Yoshihiko Yuba, Kenji Gamo

Journal:

Journal of Magnetism and Magnetic Materials

Year:

2000

Language:

english

File:

PDF, 237 KB

english, 2000

45

Effect of stray field induced by cross shape in a 200-nm-wide Co wire

Takashi Kimura, Fujio Wakaya, Kenji Gamo

Journal:

Journal of Magnetism and Magnetic Materials

Year:

2001

Language:

english

File:

PDF, 195 KB

english, 2001

46

The cardiac memory “using the body surface activation recovery interval map”

Wakaya Fujiwara, Kenji Tamura, Satoshi Kakizawa, Osamu Inami, Takahisa Kondo, Hiroatu Yokoi, Toshiya Furuta, Yasuhiro Abo, Yoshihiko Watanabe

Journal:

Journal of Cardiac Failure

Year:

2003

Language:

english

File:

PDF, 52 KB

english, 2003

47

Effects of ultra-violet laser irradiation on graphene

Wakaya, Fujio, Teraoka, Tsuyoshi, Kisa, Toshiya, Manabe, Tomoya, Abo, Satoshi, Takai, Mikio

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 532 KB

english, 2012

48

Low dose of hydrochlorothiazide, in combination with angiotensin receptor blocker, reduces blood pressure effectively without adverse effect on glucose and lipid profiles

Fujiwara, Wakaya, Izawa, Hideo, Ukai, Gen, Yokoi, Hiroatsu, Mukaide, Daisuke, Kinoshita, Kohsuke, Morimoto, Shin-ichiro, Ishii, Junichi, Ozaki, Yukio, Nomura, Masanori

Journal:

Heart and Vessels

Year:

2013

Language:

english

File:

PDF, 257 KB

english, 2013

49

Development of planar x-ray source using gated carbon nanotube emitter

Manabe, Tomoya, Nitta, Shogo, Abo, Satoshi, Wakaya, Fujio, Takai, Mikio

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2013

Language:

english

File:

PDF, 865 KB

english, 2013

50

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Advances in Resist Technology and Processing XVIII - Creation of low-molecular-weight organic resists for nanometer lithography

Kadota, Toshiaki, Yoshiiwa, Motoko, Kageyama, Hiroshi, Wakaya, Fujio, Gamo, Kenji, Shirota, Yasuhiko, Houlihan, Francis M.

Year:

2001

Language:

english

File:

PDF, 317 KB

english, 2001